Small Scale Piezoelectric Power Transducers: From Materials to Applications

Wen-jong Wu

Wen-jong Wu, National Taiwan University


Abstract: In this talk, the metal-based aerosol deposition piezoelectric thick-film fabrication techniques that enable the creation of high coupling piezoelectric materials and lower stiffness mechanical structures for fabricating piezoelectric power transducers to handle more power will be presented. The fundamentals of small-scale piezoelectric power transducers, encompassing energy harvesters, sensors, and actuators designed to handle larger energy capacities, will be introduced. The talk will begin with a comparison of piezoelectric and electrostatic energy harvesting techniques, highlighting their respective advantages and disadvantages. From a material perspective, the selection and fabrication processes for high coupling piezoelectric thin-film and thick-film materials will be discussed, including possible methods and materials, as well as the figure of merit and optimization processes. The mechanical perspective will cover the design, modeling, and considerations for cantilever-type transducers operating in d31 and d33 modes, along with the silicon-based and metal-based MEMS process flows. Additionally, the application scenarios and related design considerations will be introduced. This includes the transducer design and fabrication processes for MEMS generators. Other applications of the piezoelectric fabrication platform, such as ultrasonic transducers and MEMS speakers, will also be presented.

Bio: Professor, Department of Engineering Science and Ocean Engineering, National Taiwan University, T: +886-2-33665724, E: wjwu@ntu.edu.tw Wen-Jong Wu is currently Professor with Department of Engineering Science and Ocean Engineering, National Taiwan University, Taipei, Taiwan. Wen-Jong Wu got his Ph.D degree in Institute of Applied Mechanics from National Taiwan University. He joined Department of Engineering Science and Ocean Engineering, National Taiwan University as Assistant Professor since 2003, has been Associate Professor since 2010, and has been Professor since 2014. He has been inviting Professors in ENS de Cachan and INSA de Lyon in 2015 and 2018, respectively. His research interests are in piezoelectric power transducers, small-scale piezoelectric energy harvesting, and ultrasonic/acoustic transducers. Education Ph.D. Institute of Applied Mechanics, National Taiwan University, Taiwan, 2003. M.S. Institute of Applied Mechanics, National Taiwan University, Taiwan, 1998. B.S. Department of Civil Engineering, National Taiwan University, Taiwan, 1996. Current position and relevant experience 2/2021-1/2025 Director, Open Instrument Product Center, ADLINK Technology Inc. (Professional leave) 1/2018, 7/2018 (two months): Professeur Invite, LGEF Lab, INSA de Lyon, Lyon France 8/2015 – present: Deputy Director, Yen Tjing-Ling Industrial Research Institute, National Taiwan University 1/2015 – 2/2015: Professeur Invite, Satie Lab, ENS de CACHAN, Cachan France 2/2010 - present: Associate editor, Smart Materials and Structures, Institute of Physics (IoP) 8/2014 - present: Professor, Department of Engineering Science and Ocean Engineering National, College of Engineering, National Taiwan University, Taipei, Taiwan 8/2010 - 8/2014: Associate Professor, Department of Engineering Science and Ocean Engineering National, College of Engineering, National Taiwan University, Taipei, Taiwan 8/2007 - 8/2008: Visiting Assistant Professor, Sibley School of Mechanical and Aerospace Engineering, College of Engineering, Cornell University, NY USA 8/2003 - 8/2010: Assistant Professor, Department of Engineering Science and Ocean Engineering National, College of Engineering, National Taiwan University, Taipei, Taiwan